Deep Ultraviolet Quasi-continuous Laser Source Realizes Domestic Replacement

With the increasing domestic demand for high-end deep ultraviolet light sources in the 266nm and below bands, foreign imported light sources with a monopoly position have procurement risks, and it is difficult to ensure the after-sales timeliness of products. Domestic related industries urgently need high-end deep ultraviolet light sources to achieve localization alternative. In this context, RSLASER utilizes the existing optical, mechanical, electrical, control, measurement and other complete R&D systems to actively carry out scientific research, break through a number of key core technical difficulties, and form high-end deep ultraviolet light source products with high stability and reliability. , This series of products have completely independent intellectual property rights, which can realize the localized replacement of high-end deep ultraviolet light sources.

RSLASER has launched a variety of products in the deep ultraviolet band, mainly in the 213nm band and 266nm band, and has developed 4 mature models, the pulse width is less than 10ps, the spectral line width is less than 15pm, and the repetition frequency is mainly 1MHz/70MHz. High-end deep-ultraviolet light source whose technical parameters are benchmarked against imported products. Among them, the high-frequency and high-power picosecond-level solid-state laser light source in the 266nm band has been successfully introduced to the market, and commercial orders have been formed in the semiconductor inspection industry and the laser fine micro-processing industry.

Due to the high single-photon energy of deep ultraviolet lasers, nonlinear crystals are easily damaged, and ensuring long-term reliability is a challenge. RSLASER independent research and development, through the unique design of the power stability control algorithm with independent intellectual property rights, automatic point shifting, high beam quality design, purging filter protection design, etc. It has reached the world's advanced level: the single-point life can achieve continuous operation of more than 1000 hours, the average power RMS of 1000 hours is less than 0.5%, and the beam quality M² is less than 1.2, which has surpassed the level of similar imported products.

At the same time, RSLASER is actively developing the same type of higher repetition frequency 120MHz deep ultraviolet high-power industrial-grade solid-state laser light source, and for the actual needs of more types of industrial users, it has developed a tunable pulse width of 2-7ns and a tunable frequency of 1Hz-1MHz. Research and development of 266nm high-power solid-state lasers. At present, the above models have completed the program verification and process finalization, and are in the process of commercialized production. They will soon form shelf products and put them on the market, providing domestic industrial users with more choices for high-end deep ultraviolet light sources.

Since the establishment of the company, RSLASER has carried out research and development work on deep ultraviolet quasi-continuous solid-state laser light sources. It has a complete R&D and production team in the fields of optics, mechanics, electricity, control, system and integration. It is the only company in China that can provide customers with wavelengths of 266nm and below. A supplier of deep ultraviolet, high repetition frequency, high power, industrial grade, solid-state laser light source.

The company has been deeply involved in the industrial-grade deep ultraviolet laser industry for many years. It is the only company in China and the third company in the world to develop and industrialize the whole chain of lithography excimer laser technology. More than 100 patents have been authorized and many other core competencies. With a professional team, it can provide customers with real-time technical support, ensure the stable operation of customer equipment, ensure product quality and meet customer delivery cycle requirements, and escort customer economic benefits.